JPS6234439Y2 - - Google Patents

Info

Publication number
JPS6234439Y2
JPS6234439Y2 JP2867882U JP2867882U JPS6234439Y2 JP S6234439 Y2 JPS6234439 Y2 JP S6234439Y2 JP 2867882 U JP2867882 U JP 2867882U JP 2867882 U JP2867882 U JP 2867882U JP S6234439 Y2 JPS6234439 Y2 JP S6234439Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer support
side frame
quartz glass
support device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2867882U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58131630U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2867882U priority Critical patent/JPS58131630U/ja
Publication of JPS58131630U publication Critical patent/JPS58131630U/ja
Application granted granted Critical
Publication of JPS6234439Y2 publication Critical patent/JPS6234439Y2/ja
Granted legal-status Critical Current

Links

JP2867882U 1982-03-01 1982-03-01 半導体ウエハの支持装置 Granted JPS58131630U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2867882U JPS58131630U (ja) 1982-03-01 1982-03-01 半導体ウエハの支持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2867882U JPS58131630U (ja) 1982-03-01 1982-03-01 半導体ウエハの支持装置

Publications (2)

Publication Number Publication Date
JPS58131630U JPS58131630U (ja) 1983-09-05
JPS6234439Y2 true JPS6234439Y2 (en]) 1987-09-02

Family

ID=30040514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2867882U Granted JPS58131630U (ja) 1982-03-01 1982-03-01 半導体ウエハの支持装置

Country Status (1)

Country Link
JP (1) JPS58131630U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11521876B2 (en) * 2018-03-07 2022-12-06 Tokyo Electron Limited Horizontal substrate boat

Also Published As

Publication number Publication date
JPS58131630U (ja) 1983-09-05

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